장비 모니터

실시간 장비 상태 · 24시간 클럭 · MTBF 누적 — 총 24대

보전 대시보드
FILTER 전체 24 Logic A 6 Logic B 6 Memory 6 Pilot R&D 6 RUN 12 IDLE 8 WARN 2 DOWN 1 PM 1

24시간 클럭 — 24대

RUN IDLE WARN DOWN PM
EQ-001
Photo-A1
Logic A · Photo
00:0006:0012:0018:0024:00
84.7% AVAIL
RUNNING
MTBF 148.2h
EQ-002
Etch-A1
Logic A · Etch
00:0006:0012:0018:0024:00
84.7% AVAIL
RUNNING
MTBF 132.4h
EQ-003
Etch-A2
Logic A · Etch
00:0006:0012:0018:0024:00
0% AVAIL
IDLE
MTBF 156.0h
EQ-004
CVD-A1
Logic A · CVD
00:0006:0012:0018:0024:00
84.7% AVAIL
RUNNING
MTBF 240.8h
EQ-005
CMP-A1
Logic A · CMP
00:0006:0012:0018:0024:00
75% AVAIL
PM IN PROGRESS
MTBF 180.0h
EQ-006
Metro-A1
Logic A · Metrology
00:0006:0012:0018:0024:00
84.7% AVAIL
RUNNING
MTBF 320.0h
EQ-011
Photo-B1
Logic B · Photo
00:0006:0012:0018:0024:00
84.7% AVAIL
RUNNING
MTBF 112.4h
EQ-012
Etch-B1
Logic B · Etch
00:0006:0012:0018:0024:00
84.7% AVAIL
RUNNING
MTBF 96.8h
EQ-013
Etch-B2
Logic B · Etch
00:0006:0012:0018:0024:00
84.7% AVAIL
WARN
MTBF 88.2h
EQ-014
CVD-B1
Logic B · CVD
00:0006:0012:0018:0024:00
86.1% AVAIL
DOWN 23m
MTBF 72.0h
EQ-015
CMP-B1
Logic B · CMP
00:0006:0012:0018:0024:00
84.7% AVAIL
RUNNING
MTBF 168.4h
EQ-016
Metro-B1
Logic B · Metrology
00:0006:0012:0018:0024:00
0% AVAIL
IDLE
MTBF 280.0h
EQ-021
Photo-M1
Memory · Photo
00:0006:0012:0018:0024:00
84.7% AVAIL
RUNNING
MTBF 196.8h
EQ-022
Etch-M1
Memory · Etch
00:0006:0012:0018:0024:00
93.1% AVAIL
WARN
MTBF 104.6h
EQ-023
Etch-M2
Memory · Etch
00:0006:0012:0018:0024:00
84.7% AVAIL
RUNNING
MTBF 112.2h
EQ-024
CVD-M1
Memory · CVD
00:0006:0012:0018:0024:00
84.7% AVAIL
RUNNING
MTBF 208.0h
EQ-025
CMP-M1
Memory · CMP
00:0006:0012:0018:0024:00
84.7% AVAIL
RUNNING
MTBF 176.0h
EQ-026
Metro-M1
Memory · Metrology
00:0006:0012:0018:0024:00
84.7% AVAIL
RUNNING
MTBF 312.0h
EQ-031
Photo-P1
Pilot R&D · Photo
00:0006:0012:0018:0024:00
0% AVAIL
IDLE
MTBF 140.0h
EQ-032
Etch-P1
Pilot R&D · Etch
00:0006:0012:0018:0024:00
0% AVAIL
IDLE
MTBF 120.0h
EQ-033
CVD-P1
Pilot R&D · CVD
00:0006:0012:0018:0024:00
0% AVAIL
IDLE
MTBF 180.0h
EQ-034
CMP-P1
Pilot R&D · CMP
00:0006:0012:0018:0024:00
0% AVAIL
IDLE
MTBF 150.0h
EQ-035
Metro-P1
Pilot R&D · Metrology
00:0006:0012:0018:0024:00
0% AVAIL
IDLE
MTBF 250.0h
EQ-036
WAT-P1
Pilot R&D · WAT
00:0006:0012:0018:0024:00
0% AVAIL
IDLE
MTBF 200.0h