EQ-005 CMP-A1

Logic A CMP · recipe 없음

목록

AVAILABILITY

75%

UTILIZATION

75%

RUN + WARN

MTBF (24H)

180.0h

▲ 4.2h

DOWNTIME

0h 0m

안정 가동

24시간 클럭 (분 단위)

RUN 1080m IDLE 180m WARN 0m DOWN 0m PM 180m

00:0003:0006:0009:0012:0015:0018:0021:0024:00

상태 분포 (24h)

RUN

75% 18h 0m

IDLE

12.5% 3h 0m

PM

12.5% 3h 0m

장비 정보

Code EQ-005

Name CMP-A1

Type CMP

Line Logic A · 28nm

Status PM

Recipe —

MTBF 180.0 h

Vendor ASML / TEL / AMAT (mock)

Install 2025-08-14

Last PM 2026-04-23

Next PM 2026-05-23