EQ-014 CVD-B1
Logic B CVD · recipe 없음
장비 다운 — Cooling fault
23분 경과 · 자동 정지됨 · supervisor 호출 완료
AVAILABILITY
86.1%
UTILIZATION
88.2%
RUN + WARN
MTBF (24H)
72.0h
▲ 4.2h
DOWNTIME
0h 23m
24h 누적
24시간 클럭 (분 단위)
00:0003:0006:0009:0012:0015:0018:0021:0024:00
상태 분포 (24h)
RUN
86.1%
20h 40m
IDLE
10.2%
2h 27m
WARN
2.1%
0h 30m
DOWN
1.6%
0h 23m
장비 정보
Code
EQ-014
Name
CVD-B1
Type
CVD
Line
Logic B · 14nm
Status
DOWN
Recipe
—
MTBF
72.0 h
Vendor
ASML / TEL / AMAT (mock)
Install
2025-08-14
Last PM
2026-04-23
Next PM
2026-05-23