EQ-004 CVD-A1
Logic A CVD · recipe CV-28-D03
AVAILABILITY
84.7%
UTILIZATION
86.1%
RUN + WARN
MTBF (24H)
240.8h
▲ 4.2h
DOWNTIME
0h 0m
안정 가동
24시간 클럭 (분 단위)
00:0003:0006:0009:0012:0015:0018:0021:0024:00
상태 분포 (24h)
RUN
84.7%
20h 20m
IDLE
9.7%
2h 20m
WARN
1.4%
0h 20m
PM
4.2%
1h 0m
장비 정보
Code
EQ-004
Name
CVD-A1
Type
CVD
Line
Logic A · 28nm
Status
RUN
Recipe
CV-28-D03
MTBF
240.8 h
Vendor
ASML / TEL / AMAT (mock)
Install
2025-08-14
Last PM
2026-04-23
Next PM
2026-05-23