EQ-013 Etch-B2

Logic B Etch · recipe ET-14-L03

목록

주의 — 워밍업 임계

안정화 시간 90% 도달

AVAILABILITY

84.7%

UTILIZATION

86.1%

RUN + WARN

MTBF (24H)

88.2h

▲ 4.2h

DOWNTIME

0h 0m

안정 가동

24시간 클럭 (분 단위)

RUN 1220m IDLE 140m WARN 20m DOWN 0m PM 60m

00:0003:0006:0009:0012:0015:0018:0021:0024:00

상태 분포 (24h)

RUN

84.7% 20h 20m

IDLE

9.7% 2h 20m

WARN

1.4% 0h 20m

PM

4.2% 1h 0m

장비 정보

Code EQ-013

Name Etch-B2

Type Etch

Line Logic B · 14nm

Status WARN

Recipe ET-14-L03

MTBF 88.2 h

Vendor ASML / TEL / AMAT (mock)

Install 2025-08-14

Last PM 2026-04-23

Next PM 2026-05-23