장비 모니터

실시간 장비 상태 · 24시간 클럭 · MTBF 누적 — 총 24대

보전 대시보드
FILTER 전체 24 Logic A 6 Logic B 6 Memory 6 Pilot R&D 6 RUN 12 IDLE 8 WARN 2 DOWN 1 PM 1

24시간 클럭 — 6대

RUN IDLE WARN DOWN PM
EQ-011
Photo-B1
Logic B · Photo
00:0006:0012:0018:0024:00
84.7% AVAIL
RUNNING
MTBF 112.4h
EQ-012
Etch-B1
Logic B · Etch
00:0006:0012:0018:0024:00
84.7% AVAIL
RUNNING
MTBF 96.8h
EQ-013
Etch-B2
Logic B · Etch
00:0006:0012:0018:0024:00
84.7% AVAIL
WARN
MTBF 88.2h
EQ-014
CVD-B1
Logic B · CVD
00:0006:0012:0018:0024:00
86.1% AVAIL
DOWN 23m
MTBF 72.0h
EQ-015
CMP-B1
Logic B · CMP
00:0006:0012:0018:0024:00
84.7% AVAIL
RUNNING
MTBF 168.4h
EQ-016
Metro-B1
Logic B · Metrology
00:0006:0012:0018:0024:00
0% AVAIL
IDLE
MTBF 280.0h