장비 모니터

실시간 장비 상태 · 24시간 클럭 · MTBF 누적 — 총 24대

보전 대시보드
FILTER 전체 24 Logic A 6 Logic B 6 Memory 6 Pilot R&D 6 RUN 12 IDLE 8 WARN 2 DOWN 1 PM 1

24시간 클럭 — 6대

RUN IDLE WARN DOWN PM
EQ-021
Photo-M1
Memory · Photo
00:0006:0012:0018:0024:00
84.7% AVAIL
RUNNING
MTBF 196.8h
EQ-022
Etch-M1
Memory · Etch
00:0006:0012:0018:0024:00
93.1% AVAIL
WARN
MTBF 104.6h
EQ-023
Etch-M2
Memory · Etch
00:0006:0012:0018:0024:00
84.7% AVAIL
RUNNING
MTBF 112.2h
EQ-024
CVD-M1
Memory · CVD
00:0006:0012:0018:0024:00
84.7% AVAIL
RUNNING
MTBF 208.0h
EQ-025
CMP-M1
Memory · CMP
00:0006:0012:0018:0024:00
84.7% AVAIL
RUNNING
MTBF 176.0h
EQ-026
Metro-M1
Memory · Metrology
00:0006:0012:0018:0024:00
84.7% AVAIL
RUNNING
MTBF 312.0h