장비 모니터

실시간 장비 상태 · 24시간 클럭 · MTBF 누적 — 총 24대

보전 대시보드
FILTER 전체 24 Logic A 6 Logic B 6 Memory 6 Pilot R&D 6 RUN 12 IDLE 8 WARN 2 DOWN 1 PM 1

24시간 클럭 — 8대

RUN IDLE WARN DOWN PM
EQ-003
Etch-A2
Logic A · Etch
00:0006:0012:0018:0024:00
0% AVAIL
IDLE
MTBF 156.0h
EQ-016
Metro-B1
Logic B · Metrology
00:0006:0012:0018:0024:00
0% AVAIL
IDLE
MTBF 280.0h
EQ-031
Photo-P1
Pilot R&D · Photo
00:0006:0012:0018:0024:00
0% AVAIL
IDLE
MTBF 140.0h
EQ-032
Etch-P1
Pilot R&D · Etch
00:0006:0012:0018:0024:00
0% AVAIL
IDLE
MTBF 120.0h
EQ-033
CVD-P1
Pilot R&D · CVD
00:0006:0012:0018:0024:00
0% AVAIL
IDLE
MTBF 180.0h
EQ-034
CMP-P1
Pilot R&D · CMP
00:0006:0012:0018:0024:00
0% AVAIL
IDLE
MTBF 150.0h
EQ-035
Metro-P1
Pilot R&D · Metrology
00:0006:0012:0018:0024:00
0% AVAIL
IDLE
MTBF 250.0h
EQ-036
WAT-P1
Pilot R&D · WAT
00:0006:0012:0018:0024:00
0% AVAIL
IDLE
MTBF 200.0h