장비 모니터

실시간 장비 상태 · 24시간 클럭 · MTBF 누적 — 총 24대

보전 대시보드
FILTER 전체 24 Logic A 6 Logic B 6 Memory 6 Pilot R&D 6 RUN 12 IDLE 8 WARN 2 DOWN 1 PM 1

24시간 클럭 — 6대

RUN IDLE WARN DOWN PM
EQ-001
Photo-A1
Logic A · Photo
00:0006:0012:0018:0024:00
84.7% AVAIL
RUNNING
MTBF 148.2h
EQ-002
Etch-A1
Logic A · Etch
00:0006:0012:0018:0024:00
84.7% AVAIL
RUNNING
MTBF 132.4h
EQ-003
Etch-A2
Logic A · Etch
00:0006:0012:0018:0024:00
0% AVAIL
IDLE
MTBF 156.0h
EQ-004
CVD-A1
Logic A · CVD
00:0006:0012:0018:0024:00
84.7% AVAIL
RUNNING
MTBF 240.8h
EQ-005
CMP-A1
Logic A · CMP
00:0006:0012:0018:0024:00
75% AVAIL
PM IN PROGRESS
MTBF 180.0h
EQ-006
Metro-A1
Logic A · Metrology
00:0006:0012:0018:0024:00
84.7% AVAIL
RUNNING
MTBF 320.0h