EQ-003 Etch-A2
Logic A Etch · recipe 없음
AVAILABILITY
0%
UTILIZATION
0%
RUN + WARN
MTBF (24H)
156.0h
▲ 4.2h
DOWNTIME
0h 0m
안정 가동
24시간 클럭 (분 단위)
00:0003:0006:0009:0012:0015:0018:0021:0024:00
상태 분포 (24h)
IDLE
100%
24h 0m
장비 정보
Code
EQ-003
Name
Etch-A2
Type
Etch
Line
Logic A · 28nm
Status
IDLE
Recipe
—
MTBF
156.0 h
Vendor
ASML / TEL / AMAT (mock)
Install
2025-08-14
Last PM
2026-04-23
Next PM
2026-05-23