EQ-006 Metro-A1
Logic A Metrology · recipe MT-CD-04
AVAILABILITY
84.7%
UTILIZATION
86.1%
RUN + WARN
MTBF (24H)
320.0h
▲ 4.2h
DOWNTIME
0h 0m
안정 가동
24시간 클럭 (분 단위)
00:0003:0006:0009:0012:0015:0018:0021:0024:00
상태 분포 (24h)
RUN
84.7%
20h 20m
IDLE
9.7%
2h 20m
WARN
1.4%
0h 20m
PM
4.2%
1h 0m
장비 정보
Code
EQ-006
Name
Metro-A1
Type
Metrology
Line
Logic A · 28nm
Status
RUN
Recipe
MT-CD-04
MTBF
320.0 h
Vendor
ASML / TEL / AMAT (mock)
Install
2025-08-14
Last PM
2026-04-23
Next PM
2026-05-23