EQ-022 Etch-M1

Memory Etch · recipe ET-10-L02

목록

주의 — SPC drift 감지

CD parameter 8 rules · Rule 3 위반

AVAILABILITY

93.1%

UTILIZATION

97.2%

RUN + WARN

MTBF (24H)

104.6h

▲ 4.2h

DOWNTIME

0h 0m

안정 가동

24시간 클럭 (분 단위)

RUN 1340m IDLE 40m WARN 60m DOWN 0m PM 0m

00:0003:0006:0009:0012:0015:0018:0021:0024:00

상태 분포 (24h)

RUN

93.1% 22h 20m

IDLE

2.8% 0h 40m

WARN

4.2% 1h 0m

장비 정보

Code EQ-022

Name Etch-M1

Type Etch

Line Memory · 10nm

Status WARN

Recipe ET-10-L02

MTBF 104.6 h

Vendor ASML / TEL / AMAT (mock)

Install 2025-08-14

Last PM 2026-04-23

Next PM 2026-05-23