EQ-015 CMP-B1
Logic B CMP · recipe CM-14-D04
AVAILABILITY
84.7%
UTILIZATION
86.1%
RUN + WARN
MTBF (24H)
168.4h
▲ 4.2h
DOWNTIME
0h 0m
안정 가동
24시간 클럭 (분 단위)
00:0003:0006:0009:0012:0015:0018:0021:0024:00
상태 분포 (24h)
RUN
84.7%
20h 20m
IDLE
9.7%
2h 20m
WARN
1.4%
0h 20m
PM
4.2%
1h 0m
장비 정보
Code
EQ-015
Name
CMP-B1
Type
CMP
Line
Logic B · 14nm
Status
RUN
Recipe
CM-14-D04
MTBF
168.4 h
Vendor
ASML / TEL / AMAT (mock)
Install
2025-08-14
Last PM
2026-04-23
Next PM
2026-05-23