장비

Stepper · Etcher · CMP · Implanter · Furnace · Probe — PM 자동 룰 + Calibration + Recipe 자격
전체 RUN 29 IDLE 5 WARN 2 DOWN 1 PM 1
EQ-C01
CMP #01
RUN
L-24 CMP Applied Materials
다음 PM 05/22 23:57 D-5
EQ-E01
Etcher #01
RUN
L-24 Etcher Lam Research
다음 PM 05/22 23:57 D-5
EQ-E02
Etcher #02
IDLE
L-24 Etcher Lam Research
EQ-I01
Implanter #01
RUN
L-24 Implanter Applied Materials
EQ-P01
Probe #01
IDLE
L-24 Probe Applied Materials
EQ-S01
Stepper #01
RUN
L-24 Stepper ASML
다음 PM 05/22 23:57 D-5
EQ-E03
Etcher #03
RUN
L-18 Etcher Lam Research
EQ-E04
Etcher #04
RUN
L-18 Etcher Lam Research
EQ-F01
Furnace #01
RUN
L-18 Furnace Tokyo Electron
EQ-I02
Implanter #02
RUN
L-18 Implanter Applied Materials
EQ-P02
Probe #02
RUN
L-18 Probe Applied Materials
EQ-S02
Stepper #02
RUN
L-18 Stepper ASML
다음 PM 05/23 19:57 D-6
EQ-C02
CMP #02
RUN
L-16 CMP Applied Materials
EQ-E05
Etcher #05
RUN
L-16 Etcher Lam Research
EQ-F02
Furnace #02
RUN
L-16 Furnace Tokyo Electron
EQ-I03
Implanter #03
RUN
L-16 Implanter Applied Materials
EQ-P03
Probe #03
RUN
L-16 Probe Applied Materials
EQ-S03
Stepper #03
WARN
L-16 Stepper ASML
다음 PM 05/18 19:57 D-1
EQ-C03
CMP #03
RUN
L-12 CMP Applied Materials
EQ-E06
Etcher #06
RUN
L-12 Etcher Lam Research
EQ-E07
Etcher #07
PM
L-12 Etcher Lam Research
EQ-F03
Furnace #03
RUN
L-12 Furnace Tokyo Electron
EQ-I04
Implanter #04
RUN
L-12 Implanter Applied Materials
EQ-P04
Probe #04
RUN
L-12 Probe Applied Materials
EQ-S04
Stepper #04
RUN
L-12 Stepper ASML
다음 PM 06/12 19:57 D-26
EQ-S05
Stepper #05
RUN
L-12 Stepper ASML
다음 PM 06/08 15:57 D-22
EQ-C04
CMP #04
IDLE
L-10 CMP Applied Materials
EQ-E08
Etcher #08
RUN
L-10 Etcher Lam Research
EQ-F04
Furnace #04
DOWN
L-10 Furnace Tokyo Electron
다음 PM 05/18 00:57 D-0
EQ-S06
Stepper #06
IDLE
L-10 Stepper ASML
다음 PM 06/14 21:57 D-28
EQ-C05
CMP #05
RUN
L-08 CMP Applied Materials
다음 PM 06/06 21:57 D-20
EQ-E09
Etcher #09
RUN
L-08 Etcher Lam Research
다음 PM 06/09 19:57 D-23
EQ-E10
Etcher #10
WARN
L-08 Etcher Lam Research
다음 PM 05/18 17:57 D-1
EQ-F05
Furnace #05
RUN
L-08 Furnace Tokyo Electron
다음 PM 06/08 13:57 D-22
EQ-I05
Implanter #05
RUN
L-08 Implanter Applied Materials
다음 PM 06/06 01:57 D-19
EQ-P05
Probe #05
IDLE
L-08 Probe Applied Materials
다음 PM 05/25 09:57 D-8
EQ-S07
EUV Stepper #07
RUN
L-08 Stepper ASML
다음 PM 06/12 17:57 D-26
EQ-S08
EUV Stepper #08
RUN
L-08 Stepper ASML
다음 PM 06/11 21:57 D-25