장비

Stepper · Etcher · CMP · Implanter · Furnace · Probe — PM 자동 룰 + Calibration + Recipe 자격
전체 RUN 29 IDLE 5 WARN 2 DOWN 1 PM 1
EQ-F04
Furnace #04
DOWN
L-10 Furnace Tokyo Electron
다음 PM 05/18 00:57 D-0