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사진 첨부 · 심각도 · Disposition (Scrap/Rework/Accept) — 24h 등록 8건

SPC 차트

CRITICAL

1

즉시 disposition 필요

MAJOR

4

▼ 추정 손실

PENDING DISPOSITION

1

검토 대기

SCRAP / REWORK

4

scrap 1 · rework 3

SEVERITY 전체 CRITICAL 1 MAJOR 4 MINOR 3 DISPOSITION PENDING 1 SCRAP 1 REWORK 3

DF-2401-001

MAJOR

2 photos

PARTICLE-LARGE

wafer 중앙부 클러스터 패턴

LOT

LM-2401-022

WAFER / EQ

#14 · EQ-022

DETECTED

13:08 · 박품질

COUNT

3 ea

PENDING Memory

DF-2401-002

MINOR

1 photos

SCRATCH

경미 — 4mm edge 영역

LOT

L1A-2401-001

WAFER / EQ

#7 · EQ-002

DETECTED

12:42 · 이주간

COUNT

1 ea

ACCEPT (DEVIATION) Logic A

DF-2401-003

CRITICAL

3 photos

PHOTO-OVERLAY

overlay 3.2nm — spec 외

LOT

L1B-2401-007

WAFER / EQ

#21 · EQ-011

DETECTED

10:24 · 김현장

COUNT

1 ea

REWORK Logic B

DF-2401-004

MINOR

1 photos

EDGE-BEAD

경계부 잔류

LOT

LM-2401-021

WAFER / EQ

#2 · EQ-021

DETECTED

11:18 · 박운영

COUNT

1 ea

ACCEPT (DEVIATION) Memory

DF-2401-005

MAJOR

2 photos

CONTAMINATION

gas line 오염 추정

LOT

LM-2401-023

WAFER / EQ

#9 · EQ-024

DETECTED

10:08 · 박운영

COUNT

5 ea

SCRAP Memory

DF-2401-006

MAJOR

2 photos

RESIST-PATTERN

노광 패턴 깨짐

LOT

L1A-2401-002

WAFER / EQ

#16 · EQ-001

DETECTED

09:52 · 이주간

COUNT

2 ea

REWORK Logic A

DF-2401-007

MINOR

1 photos

PARTICLE-LARGE

고립 particle

LOT

LM-2401-022

WAFER / EQ

#5 · EQ-022

DETECTED

09:14 · 박품질

COUNT

1 ea

ACCEPT (DEVIATION) Memory

DF-2401-008

MAJOR

2 photos

CD-OVERSIZE

CD 24.62nm — UCL 초과

LOT

L1A-2401-001

WAFER / EQ

#3 · EQ-004

DETECTED

08:42 · 이주간

COUNT

1 ea

REWORK Logic A