장비

Stepper · Etcher · CMP · Implanter · Furnace · Probe — PM 자동 룰 + Calibration + Recipe 자격
전체 RUN 29 IDLE 5 WARN 2 DOWN 1 PM 1
EQ-C02
CMP #02
RUN
L-16 CMP Applied Materials
EQ-E05
Etcher #05
RUN
L-16 Etcher Lam Research
EQ-F02
Furnace #02
RUN
L-16 Furnace Tokyo Electron
EQ-I03
Implanter #03
RUN
L-16 Implanter Applied Materials
EQ-P03
Probe #03
RUN
L-16 Probe Applied Materials
EQ-S03
Stepper #03
WARN
L-16 Stepper ASML
다음 PM 05/18 19:57 D-1