장비

Stepper · Etcher · CMP · Implanter · Furnace · Probe — PM 자동 룰 + Calibration + Recipe 자격
전체 RUN 29 IDLE 5 WARN 2 DOWN 1 PM 1
EQ-C05
CMP #05
RUN
L-08 CMP Applied Materials
다음 PM 06/06 21:57 D-20
EQ-E09
Etcher #09
RUN
L-08 Etcher Lam Research
다음 PM 06/09 19:57 D-23
EQ-E10
Etcher #10
WARN
L-08 Etcher Lam Research
다음 PM 05/18 17:57 D-1
EQ-F05
Furnace #05
RUN
L-08 Furnace Tokyo Electron
다음 PM 06/08 13:57 D-22
EQ-I05
Implanter #05
RUN
L-08 Implanter Applied Materials
다음 PM 06/06 01:57 D-19
EQ-P05
Probe #05
IDLE
L-08 Probe Applied Materials
다음 PM 05/25 09:57 D-8
EQ-S07
EUV Stepper #07
RUN
L-08 Stepper ASML
다음 PM 06/12 17:57 D-26
EQ-S08
EUV Stepper #08
RUN
L-08 Stepper ASML
다음 PM 06/11 21:57 D-25