장비

Stepper · Etcher · CMP · Implanter · Furnace · Probe — PM 자동 룰 + Calibration + Recipe 자격
전체 RUN 29 IDLE 5 WARN 2 DOWN 1 PM 1
EQ-E03
Etcher #03
RUN
L-18 Etcher Lam Research
EQ-E04
Etcher #04
RUN
L-18 Etcher Lam Research
EQ-F01
Furnace #01
RUN
L-18 Furnace Tokyo Electron
EQ-I02
Implanter #02
RUN
L-18 Implanter Applied Materials
EQ-P02
Probe #02
RUN
L-18 Probe Applied Materials
EQ-S02
Stepper #02
RUN
L-18 Stepper ASML
다음 PM 05/23 19:57 D-6