장비

Stepper · Etcher · CMP · Implanter · Furnace · Probe — PM 자동 룰 + Calibration + Recipe 자격
전체 RUN 29 IDLE 5 WARN 2 DOWN 1 PM 1
EQ-C03
CMP #03
RUN
L-12 CMP Applied Materials
EQ-E06
Etcher #06
RUN
L-12 Etcher Lam Research
EQ-E07
Etcher #07
PM
L-12 Etcher Lam Research
EQ-F03
Furnace #03
RUN
L-12 Furnace Tokyo Electron
EQ-I04
Implanter #04
RUN
L-12 Implanter Applied Materials
EQ-P04
Probe #04
RUN
L-12 Probe Applied Materials
EQ-S04
Stepper #04
RUN
L-12 Stepper ASML
다음 PM 06/12 19:57 D-26
EQ-S05
Stepper #05
RUN
L-12 Stepper ASML
다음 PM 06/08 15:57 D-22