장비

Stepper · Etcher · CMP · Implanter · Furnace · Probe — PM 자동 룰 + Calibration + Recipe 자격
전체 RUN 29 IDLE 5 WARN 2 DOWN 1 PM 1
EQ-C01
CMP #01
RUN
L-24 CMP Applied Materials
다음 PM 05/22 23:57 D-5
EQ-E01
Etcher #01
RUN
L-24 Etcher Lam Research
다음 PM 05/22 23:57 D-5
EQ-E02
Etcher #02
IDLE
L-24 Etcher Lam Research
EQ-I01
Implanter #01
RUN
L-24 Implanter Applied Materials
EQ-P01
Probe #01
IDLE
L-24 Probe Applied Materials
EQ-S01
Stepper #01
RUN
L-24 Stepper ASML
다음 PM 05/22 23:57 D-5